EFC Gases & Advanced Materials has launched a collaborative research program with the Cornell NanoScale Science and Technology Facility (CNF) to explore sustainable alternatives for the semiconductor industry. The focus of this partnership is to evaluate low global warming potential (low-GWP) fluorocarbons as eco-friendly replacements for the currently used fluorocarbons (FCs) and hydrofluorocarbons (HFCs) in critical etching applications. These incumbent gases, known for their negative environmental impact, are essential in semiconductor materials processing, yet there are no viable alternatives available.
The Cornell NanoScale Science and Technology Facility, part of Research and Innovation at Cornell, is a premier open user nanofabrication facility that provides state-of-the-art resources for research and product development in nanoscience and nanoengineering. As a member of the National Nanotechnology Coordinated Infrastructure (NNCI), CNF is recognized for its advanced capabilities in nanofabrication and its contribution to cutting-edge research.
This research program, funded exclusively by EFC, aims to investigate the effectiveness of several low-GWP etching candidates for high aspect ratio (HAR) etching of silicon-based materials. Through a series of carefully designed experiments, the performance of these low-GWP candidates will be assessed against incumbent fluorocarbons such as octafluorocyclobutane (C4F8), and hydrofluorocarbons like HFC-23, trifluoromethane (CHF3).
The ultimate goal of this initiative is to develop efficient and sustainable etching processes for critical semiconductor materials, aligning with EFC's commitment to providing high-quality, environmentally friendly products to the electronics industry. This initiative is part of EFC's broader effort to introduce sustainable solutions and reduce the environmental impact of the semiconductor manufacturing process. With the collaboration of the Cornell NanoScale Science and Technology Facility, EFC aims to advance the frontier of sustainable semiconductor processing.