The CNF is primarily a hands-on facility, offering researchers access and training to use a comprehensive tool set with the support of an experienced technical staff. In limited circumstances, researchers can also engage the CNF in remote projects; that is, fabrication conducted by CNF staff members with only the off-site involvement of the researcher. Remote projects are performed as a service, and only in cases where;
the work needed is sufficiently limited that travel to Ithaca unwarranted,
appropriate tool resources are available, and
staff availability will allow completion in a timely manner.
Remote projects comprise activities in which the CNF staff perform only a small number of routine and well characterized process steps that can be completed within a limited amount of staff time. CNF staff will not engage in remote projects that involve project design, significant process characterization, or require research decisions or judgments. All remote work is performed on a best effort basis, and CNF does not guarantee success of the work product. The CNF User Program Managers can advise interested parties on the possibilities, constraints, and costs of such remote work. In the event that CNF cannot accept a request for remote work, researchers may wish to consider other options, including hiring a private contractor as discussed below.
14 years’ experience in the simulation, design, fabrication, testing and packaging of CMOS and MEMS/NEMS devices. Services offered include: MEMS/NEMS COMSOL/ANSYS simulation, mask design, mask making, optical/e-beam lithography, thin film deposition (sputtering, evaporation, LPCVD, PECVD), RIE/DRIE, CMP, wafer dicing, laser cutting, wirebonding, etc. We are a team of talented engineers and scientists offering fast and affordable nano/microfabrication services to meet the highest demands of our clients. More information about the work we do can be found at www.xallent.com.
Process design/fabrication consultation for micro/nano fabricated projects including, but not limited to: MEMS/NEMS, Si CMOS, and III-V based electron devices. I have 12 years of experience in device design and fabrication at both the CNF and in semiconductor startup environments. I can assist you with all or any steps necessary to take your prototype from CAD layout to finished devices utilizing all types of lithography and other processing available at CNF. Please visit my website for a more in-depth look at projects I have undertaken.
Design, L-Edit mask layout, prototype fabrication and small batch production. Analysis and simulation of MEMS/NEMS devices using ANSYS, COMSOL and MatLab, consulting services on fabrication process development and troubleshooting. Ten years of hands-on experience at CNF and familiar with all of the major tools and processes including mask design and fabrication, photolithography, thin film deposition and etching, film characteristics measurement, device evaluation, etc. Extensive experiences leading device prototyping efforts on multiple NIH/NSF projects
1) Consultation in the design and development of your fabrication process. 2) Contract fabrication of micro/nanofabricated devices following your complete fabrication process, or 3) Performance of individual process step(s) to aid in completion of your fabrication process. I have more than 20 years of experience (the last 12 years based at the CNF) in micro/nanofabrication projects including MEMS, BioMEMS, CMOS, and more.
With over 35 years of nanofabrication experience, including more than 10 years at the CNF, I offer processing experienced processing services on all of the equipment at the CNF. This includes, but is not limited to Lithography (sDUV, I-Line,Broadband steppers, ebeam, contact lithography), Mask making, Thin film processing (LPCVD, Thermal Oxidation,PECVD, thermal and electron beam evaporation, sputter deposition, ALD), Etching (Wet and dry), metrology, and all other aspects of processing available at the CNF.
Process design/integration, mask layout and fabrication, resist processing and lithography, metal and thin film deposition (including PECVD, LPCVD, evaporation, sputtering), SEM/metrology including index of refraction measurements for photonics and integrated optics applications. I have familiarity with all of the principle tools at CNF with extensive thin film deposition and etch experience
I can help you with proposal development, CNF prototype fabrication, and publicity via "clean-room" video production. I have 15+ years of SBIR grant writing; 15+ years CNF experience in developing implantable SU-8 and polyimide biomedical devices; and I have produced clean room videos for the CNF. My website (www.brucemckee.org) documents my work in these areas, and details my specific CNF process experience in mask design & fabrication; contact lithography; metal deposition via e-beam, sputtering, and electroplating; RIE etching; PECVD; wet chemical processes; thin and thick-film measurement, and optical and SEM microscopy.