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SPIE Handbook of Microlithography, Micromachining and Microfabrication

Volume 1: Microlithography

ORDERING INFORMATION

Volume PM39, Handbook of Microlithography, Micromachining, and Microfabrication: Volume 1
P. Rai-Choudhury, Editor

Prices:

Members: $80
SPIE Working Group: $90
Nonmembers: $95

The complete volume can be ordered in one of four ways:

Phone: 360/676-3290, ask for Customer Service

Fax: 360/647-1445, attention Customer Service

Email: bookorders@spie.org

SPIE's Web order form

Table of Contents

Please send us your comments, corrections, and submissions.

Cornell University

NYSTAR

NNIN

NSF

This material is based upon work supported by the National Science Foundation under Grant No. 0649215. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

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