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SPIE Handbook of Microlithography, Micromachining and Microfabrication

Volume 1: Microlithography


Volume PM39, Handbook of Microlithography, Micromachining, and Microfabrication: Volume 1
P. Rai-Choudhury, Editor


Members: $80
SPIE Working Group: $90
Nonmembers: $95

 The complete volume can be ordered in one of four ways:

Phone: 360/676-3290, ask for Customer Service

 Fax: 360/647-1445, attention Customer Service

Email: bookorders@spie.org

SPIE's Web order form

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