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SPIE Handbook of Microlithography, Micromachining and Microfabrication, Volume 1: Microlithography

Section 2.5 Systems: 2.5.9 Electron Beam Fabrication Services


2.5.1 Environment
2.5.2 SEM and STEM Conversions
2.5.3 Commercial SEM Conversion Systems
2.5.4 Gaussian vector scan systems
2.5.5 Gaussian Spot Mask Writers
2.5.6 Shaped Spot and Cell Projection Systems
2.5.7 SCALPEL
2.5.8 Other E-Beam System Research
2.5.9 Electron Beam Fabrication Services
Table of Contents

In addition to commercial mask vendors, many institutions offer services on large, high resolution e-beam tools. Payment for services varies widely, from purely collaborative work to hourly fees or contracts. Public access to many fabrication services is provided in the U.S. by the National Nanofabrication Users Network (NNUN), based primarily at Cornell and Stanford universities. Services provided through this network and the list of other sites changes so often that it is more appropriate to refer the reader to the World Wide Web page, http://www.cnf.cornell.edu/, which provides information about the services of the NNUN and other nonaffiliated U.S. fabrication centers. A list of mask vendors can be found in the Semiconductor International Buyer's Guide.

(2005 Note:  The National Nanofabrication Users Network is now the National Nanotechnology Infrastructure Network (NNIN).  More information on this thirteen-member network can be found at www.nnin.org.)


Table of Contents
Previous section: 2.4 Proximity effect
Next section: 2.6 Data preparation

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