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Cornell NanoScale Facility / Novati Technologies, Inc.

Tool Map

Major Area Sub-Area/Capabilitiy Novati Wafer Size Cornell NanoScale Facility Wafer Size Additional Comments
Lithography Spin On Dielectric & Other Material Coating TEL ACT 8 SOD SYSTEM; TEL ACT 12 SOD SYSTEM 200-300mm Brewer Science General Purpose Spinner 100mm-200mm Manual spinner
193 nm Lithography ≥ 80 nm L/S resolution, OL ≤ 30 nm ASML XT1100/500 (NAmax 0.75) + FSI POLARIS 2500 TRACK 200-300mm N/A   
193 nm Lithography ≥ 100 nm hole resolution, OL ≤ 30 nm ASML XT1100/500 (NAmax 0.75) + FSI POLARIS 2500 TRACK 200-300mm N/A   
248 nm Lithography ≥ 180 nm L/S resolution, OL ≤ 60nm Microscan 3 (NAmax 0.6) + DNS 80B TRACK 200mm ASML PAS 5500/300C (NAmax 0.63) + SUSS MicroTec Gamma 100mm-200mm Backside alignment
248 nm Lithography ≥ 220 nm hole resolution OL ≤ 60nm Microscan 3 (NAmax 0.6) + DNS 80B TRACK 200mm ASML PAS 5500/300C (NAmax 0.63) + SUSS MicroTec Gamma 100mm-200mm Backside alignment
i-line Lithography ≥ 350 nm L/S resolution OL ≤ 100nm Canon 5500 iZa (NAmax 0.57) + DNS 80B TRACK 200-300mm GCA Autostep 200 (NA 0.45) + SUSS MicroTec Gamma Pieces-200mm Pieces-200mm
i-line Lithography ≥ 400 nm hole resolution OL ≤ 100nm Canon 5500 iZa (NAmax 0.57) + DNS 80B TRACK 200-300mm GCA Autostep 200 (NA 0.45) + SUSS MicroTec Gamma Pieces-150mm Pieces-150mm
Electron beam lithography-positive resist > 18nm L/S resolution OL < 20 nm N/A   JEOL JBX 9500FS or JBX 6300FS Piece -> 300mm  
Electron beam lithography-neg HSQ resist > 10nm L/S resolution OL < 20 nm N/A   JEOL JBX 9500FS or JBX 6300FS Piece -> 300mm  
1X/4X Mask Making N/A   Heidelberg DWL 66; Heidelberg DWL 2000 5", 6"  
Proximity Print ≥ 1u SUSS Microtech MA8 + SUSS Microtech ACS200 Track 200mm SUSS Microtech MA6 + Brewer Spin/Bake/SUSS Gamma Pieces-150mm Backside alignment
    SUSS Microtech MJB4 + Brewer Spin/Bake/SUSS Gamma Pieces-100mm Infrared alignment
    ABM + Brewer Spin/Bake/SUSS Gamma Pieces-200mm DUV exposure, IR alignment
Dry Plasma Etch & Strip Front End Resist Ash, (1) CH. - O2/CF4 Axcelus Fusion Asher 200MCU 200mm Anatech Asher(O2/N2) 100mm-200mm  
Dielectric Etch: Oxide, Nitride, BARC AMAT P5000/MxP+ Chamber 200mm Oxford Plasmalab 100 100mm  
Silicon Etch: silicon, aSi, polySi AMAT P5000/MxP Chamber 200mm Oxford Cobra (HBr, Cl2) 100mm  
    Unaxis (PT) 770(SF6+C4F8) 150mm  
    Plasma-Therm 770 (Chlorine) 100mm  
Dielectric Etch: SiO2, SiN, BARC LRC TCP 9400PTX/9100 chamber 200mm Oxford Plasmalab 80 200mm  
Poly Etch: PolySi, aSi, Si LRC TCP 9400PTX/9400FM chamber 200mm Oxford Cobra (HBr, Cl2) 100mm  
    Plasma-Therm 770 (Chlorine) 100mm  
Dielectric Etch: Oxide, Nitride, BARC AMAT Super E Chamber 200mm Plasma-Therm 72 200mm  
Deep Silicon Etch AMAT DPS DT+ 200mm Plasma-Therm Versaline; Unaxis/Plasma-Therm PT770 (Bosch) 100mm  
Metal Gate Etch: DPS II AMAT Centura DPSII 200mm Plasma-Therm 740 200mm  
Novel Metal Etch: DPS II/ High Temp AMAT Centura DPSII High Temp 200mm N/A   
Tungsten (W) Etch: Clamped LRC Rainbow 4728 Tungsten 200mm Plasma-Therm 740 (unclamped) RIE 200mm  
Metal Plasma Etch: AlCu/Ti/TiN/TiW etc. LRC Research 9600 TCP 200mm Plasma-Therm 740 (unclamped) RIE 200mm  
Deep Silicon Etch STPS Rapier 200-300mm Plasma-Therm Versaline 100mm  
Barrel Asher Branson IPC4000 200mm Anatech Asher 200mm  
Backend Resist Ash (2 chambers) ULVAC Enviro 200mm YES Asher (O2, N2, Ar) 200mm  
DRM Oxide Etch: Oxide Etch TEL Unity II E 200mm Oxford Plasmalab 100 100mm  
DRM Oxide Etch: Low-K Etch TEL Unity II E 200mm Oxford Plasmalab 100 100mm  
Poly, Si Trench and Metals AMAT Centura DPSII 300mm Oxford Cobra (HBr, Cl2) 100mm  
Etch Oxide, and nitride etch for trench and contacts (Front end) AMAT Centura E-max 300mm Oxford Plasmalab 100 100mm  
Front and back end asher w O2/CF4/NH3 Axcellis (Matrix) Jaguar 300 300mm YES Asher (O2, N2, Ar) 200mm  
Oxide Trench and Via etch and ASH, > 100nm DR TEL Telius DRM O/P "T-305D" 300mm TBD   
Low K Trench and Via etch and ASH, >100nm DR TEL Telius SCCM "T-305D" 300mm TBD   
Diffusion, Chemical Vapor Deposition & Rapid Thermal Processing Atmospheric Undoped SiO2 Steam/Dry/Anneal BTU/BRUCE Horizonal Furnace 200mm MRL Furnaces 150mm  
Atmospheric Doped Oxide BTU/BRUCE Horizonal Furnace 200mm    
Atomspheric Undoped oxide: Steam or Dry Ox & Anneal SVG-THERMCO Vertical Furnace: Steam/Dry 200mm MRL Furnaces 150mm  
Low Pressure Chem. Vapor Deposition - AmorSI & POLY Si SVG-THERMCO Vertical Furnace: LPCVD Poly/Amor 200mm MRL Furnaces 150mm  
Low Pressure Chem. Vapor Deposition - TEOS SVG-THERMCO Vertical Furnace: LPCVD TEOS. 200mm MRL Furnaces 150mm  
Low Pressure Chem. Vapor Deposition - Silicon Nitride SVG-THERMCO Vertical Furnace: LPCVD Silicon Nitride 200mm MRL Furnaces 150mm  
Atmospheric Rapid Thermal Anneal (N2/O2) AG Associates AG8800 200mm AG8108 150mm  
Atmospheric Rapid Thermal Processing (Spike Anneal) Mattson 5000+ 200mm AG610 150mm  
Atomspheric FG or N2 An. Cu only BTU/BRUCE Horizonal Furnace 200mm    
POCL3 Dopant Furnace    MRL Furnaces 150mm  
Metal Anneal and Low K Cure. 4% max H2 in N2. Atmospheric or Vacuum TEL a-8SE-E Vertical Furnace 200mm MRL Furnaces 150mm  
Atm Stm/Dry/Anneal Undopoed - Atmo/Low Pressure TEL - Vertical furnace oxidation ALPHA 303H 300mm MRL Furnaces 150mm  
LPCVD Amor. Si and Poly SI (530c and 600C) TEL - Vertical furnace 303-H LPCVD POLY/AMOR 300mm MRL Furnaces 150mm  
Cu Anneal - 250c - 450c TEL - Vertical furnace ALPHA 303I-H 300mm MRL Furnaces (Anneal 1) 150mm  
Low K anneal - 535c - 620c TEL - Vertical furnace ALPHA 303H 300mm MRL Furnaces (Anneal 1) 150mm  
Wet Etch / Clean SPM, SC1, SC2, Dilute HF for oxide etch, KOH FSI Mercury Spray Processor 2 200mm Reynolds Tech bench 150mm  
Vapor HF Oxide Etch FSI Excalibur 200mm Primaxx µEtch 200mm  
Pre-gate cleans, SPM, 200:1HF oxide etch, SC1, SC2, O3 rinse DNS Wet Etch FC82-IL 200mm    
Backend Post ash cleans, Post Al etch polymer cleans SCP Global Technologies 8400 200mm    
Engineering Wet Deck - 2 tanks SCP Global Technologies 9100 200mm    
Hot H3PO4 for SiN etch, Hot KOH SCP Global Technologies 8400 200mm Reynolds Tech bench 150mm  
Backside Clean (CU) SEZ 203 Spray Acid Cleans 200mm    
WET STRIP-METAL/POLY/Si SEZ Spin Etcher 303 300mm    
Backside Cu decontamination and Via Cleans SEZ 303L 300mm    
Thin Films ALD HfO2, HfSiO2, HfZrOx, ZrO2, ZrSiO2 Vesta Atomic Layer Deposition - Dielectric ALD 200-300mm Oxford FlexAl (HfO2, HfSiO2, HfAlOx) 200mm  
ALD HfN, HfON, HfSiN, HfSiON, ZrN, ZrSiN, ZrON, ZrSiON. Vesta Atomic Layer Deposition - Dielectric ALD 200-300mm Oxford FlexAl (HfN) 200mm  
ALD Al2O3,SiO2,Ta2O5, H2O-(Al2O3,HfO2, HfSiO2, or Ta2O5) Vesta Atomic Layer Deposition - Dielectric ALD 200-300mm Oxford FlexAl (Al2O3, SiO2, Ta2O5, HfSiO2) 200mm  
ALD Thermal/Plasma anneal (H2, NH3, O2, N2O) Vesta Atomic Layer Deposition - Dielectric ALD 200-300mm Oxford FlexAl (O2, N2, Ar, NH3) 200mm  
ALD TiN, TaCN, SiN Vesta Atomic Layer Deposition - Metal ALD 200-300mm Oxford FlexAl (SiN, TaN) 200mm  
ALD Soft-Sputter etch, in situ Ti-TiN liner deposition Vesta Atomic Layer Deposition - Metal ALD 200-300mm    
PVD Metal Gate & Bias Sput'd Diel.: (Ti, Ta, W, etc.) Anelva C-7100MeGa - Target acquitsition as req'd - 5 targets 200-300mm AJA Sputter;CVC Sputter 150mm  
PVD React. Sput'd Metal & Diel.: (TiN, TaN, TiOx, etc) Anelva C-7100MeGa - Target acquitsition as req'd - 2 targets 200-300mm AJA Sputter;CVC Sputter 150mm  
PVD Metal Dep: Al , Col Ti & TiN, Uncolimated Ti, Co, Ni AMAT Endura HP 4PVD, OD, RF 200mm CVC Sputter (Uncolimated Ti, Co) 150mm  
PVD Metal Dep: IMP Ti, EnCore Ta, Cu AMAT Endura HP 4PVD, OD, RF 200mm    
PVD: Barrier/seed (Ta, Cu, CVD TiN, TiSiN) Novellus Inova 2PVD, MOCVD, OD, RF 200mm AJA Sputter (Ta, Cu, Reactive TiN); CVC Sputter (Ta, Cu, Reactive TiN) 150mm  
CVD: Undoped PETEOS, O3:TEOS, SiN, SiON, PSG, USG, SiC, Sput Etchback AMAT Precision 5000 2 TEOS, 1 Pass, 1 EB 200mm    
PECVD: Low Temp <200C, TEOS, SiN, Silox STPS APM 200-300mm    
PECVD: SILOX, SiN, SiON, SiCN, SiCo, CORAL Novellus Concept Two Sequel 200mm Oxford PECVD (SiO2, Si3N4, SiC, TEOS, SiON) 200mm  
PECVD: SILOX, SiN, SiON, TEOS    GSI PECVD (SiO2, Si3N4, TEOS, SiON) 150mm  
PECVD: PSG, BSG, BPSG    Oxford PECVD (PSG, BSG, BPSG) 200mm  
PECVD: PSG, BSG, BPSG    GSI PECVD (PSG, BSG, BPSG)   
PECVD: Tungsten Dep Novellus Concept One 200mm N/A   
ECD: Cu electrodeposition Novellus Sabre Classic 200mm Reynolds Tech Electroplate Station 150mm  
PECVD - Undoped TEOS CVD & Silane CVD SIN ASM America Eagle-12 Plasma CVD 300mm Oxford PECVD (SiO2, Si3N4, SiC, TEOS, SiON) 200mm  
    GSI PECVD (SiO2, Si3N4, TEOS, SiON) 150mm  
PECVD ILD SILOX, SIN, SION, SICN, SICO, AND CORAL Novellus Vector 300mm Oxford PECVD (SiO2, Si3N4, TEOS, SiON) 200mm  
    GSI PECVD (SiO2, Si3N4, TEOS, SiON) CMOS metals only 150mm  
Copper Plate Novellus Sabre xT 300mm Reynolds Tech Electroplate Station 150mm  
PVD Cu/Ta/TaN Novellus Inova xT Concept 3 300mm CVC Sputter;AJA Sputter;CVC Evaporator 150mm  
Chemical Mechanical Polish (CMP) CMP: STI oxide, ILD oxide, SiN, W, Cu, Ta/TaN, Si, polyimide AMAT Mirra with Ontrack Scrubber, Titan Head 200mm Logitech Orbis 200mm  
CMP: STI oxide, ILD oxide, SiN, W, Cu, Ta/TaN AMAT Mirra Mesa, Contour and Profiler Heads 200mm Logitech Orbis 200mm  
CMP: Cu/Ta/TaN, SiO2 AMAT Reflexion CMP-PST System 300mm Logitech Orbis 200mm  
Metrology Ellipsometer Dielectric Thickness, N & K Values JA Woollam VU-301 200mm JA Woollam 200mm  
EOT Measurement - Gate Monitor KLA-Tencor Quantox-300 200-300mm N/A   
Prism Coupler Index Measurement N/A   Metricon 2010M 200mm  
Prism Coupler Waveguide Loss Measurement N/A   Metricon 2010M 200mm  
Ellipsometry - Film Thk w UV/Deuterium Source w Desorber Thermawave OP5240 Opti-Probe 200mm N/A   
Dark Field Wafer Defect Inspection AMAT Complus 200-300mm Olympus MX50 200mm  
Four Point Probe Contact Resistivity Four Dimensions 300 200-300mm CDE 4-pt. Probe 200mm  
Four Point Probe Contact Resistivity Prometrix 4PT probe 200mm CDE 4-pt. Probe 200mm  
DC IV/CV Parametric Test Probe Station    Karl SUSS PSM6, Keithley Instruments SMUs 150mm  
Defview Review & UV Inspet. scope, (x250) Olympus, FR3200 200-300mm Olympus MX50-BF, DF, Polarized, Nomarski 200mm  
Automated Particle Unpat. Surf. Insp. KLA-Tencor SP1 200-300mm N/A   
Automated Particle Unpat. Surf. Insp. KLA-Tencor Surfscan 6420 or 6220 200mm N/A   
Film Stress & Wafer Bow KLA-Tencor Flexus 5400 200mm Flexus 200mm  
Film Thickness Measurement- Reflectometry KLA-Tencor UV1050 200mm Leitz Film Measurement System;Filmetrics F40/F50 EXR 200mm  
Texture Measurement - Laser Based Veeco TMS-3000W 200-300mm Zygo New View Interferometer 200mm  
Profiler/Atomic Force Micro. - Tapping Mode with Silicon Tip Veeco - Digital Instruments VX310 AFM 200-300mm Veeco Icon 150mm  
Total Reflect X-Ray Fluor. Spect. TECHNOS (PHILLIPS) TREX630 200-300mm N/A   
Overlay Inspection KLA-Tencor 5100-03 Auto Misreg Sys 200mm N/A   
Overlay Inspection KLA-Tencor 6100 Auto Misreg Sys 200mm N/A   
SEM Top-Down CD, Etch Depth & Profile Angle w Tilt AMAT Verity CD-SEM 200-300mm Zeiss Supra FE-SEM 150mm  
SEM Top-Down CD, Etch Depth & Profile Angle w Tilt AMAT VersaSys 3D CD-SEM 200-300mm Zeiss Ultra FE-SEM 150mm  
Overlay Inspection. Manual, used with ALN71 or BND Tools EVG EV40-NT OVERLAY TOOL 200mm N/A   
Metal Film T- Opto-acoustic, Automated Phillips Impulse 300B 200-300mm N/A   
X-Ray Refl./X-Ray Flor. Thin Film measurement Jordan Valley JVX 5200T XRR/XRF TF Meas. 200-300mm N/A   
In-line DC/Small Signal AC test Agilient 4073A/TEL P-12XL (tester) 200-300mm Keithley IV-CV Measurement System 150mm  
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