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CNF-Fraunhofer IPMS Partnership Press Release

The Fraunhofer Institute for Photonic Microsystems (IPMS) in Dresden, Germany and the Cornell NanoScale Science and Technology Facility (CNF) at Cornell University in Ithaca, NY are pleased to announce a partnership to accelerate nanotechnology commercialization. The two partners have completed a tool map that allows small companies to plan the growth of their R&D prototyping activities into commercial foundries by developing their micro/nanofabrication process in a planned way that minimizes technology disruptions.

The Cornell NanoScale Facility at Cornell University is known for its flexible prototyping facilities and engineering support during product research and development stages. CNF now adds the Fraunhofer Institute to its list of partners that can provide a significant commercial ramp-up and volume manufacturing for clients who wish to grow their silicon-related and MEMS businesses beyond what CNF can provide.
Fraunhofer offers microelectronic R&D and pilot manufacturing solutions for various application fields and at institutes across Germany. In this initial partnership, the CNF-Fraunhofer related tool map is focused on silicon-related processes available at Fraunhofer IPMS facilities in Dresden, which make two clean room facilities available:

1) A 200mm wafer MEMS clean room (1500 m / 15,000 ft; ISO 14644-1 class 4) in which they offer complete solutions for micromechanical and photonic microsystems from conception to component up to complete systems. Furthermore, Fraunhofer IPMS provides established links to X-FAB Dresden, a leading analog / mixed signal foundry in close vicinity, for seamless transfer to high volume production.

2) A 300mm wafer advanced CMOS clean room (1000 m; ISO 14644-1 class 6) at the Center Nanoelectronic Technologies (CNT) that offers a wide range of state-of-the-art industry standard processing and analytic equipment including a complete Copper Back-End-of-Line Module. The clean room is also qualified for wafer exchange (short loops) with Global Foundries Fab 1 Dresden and Infineon Dresden and so further scale-up solutions for advanced technology nodes and lithography access can be offered in cooperation with these industry partners.

Don Tennant, CNF Director of Operations, stated, We are excited to have a partner where we can refer our small business customers to get the assistance they need to fully commercialize their concepts and prototypes in the CMOS, Silicon Photonics, and MEMS space. We also hope that cross referrals to CNF will allow us to provide services to Fraunhofer clients who are not yet at the scale-up stage and require the flexibility to explore a variety of approaches.

Martin Landgraf, Program Coordinator for the Fraunhofer Institute for Photonic Microsystems (IPMS), added, We are delighted to have this cooperation in place. With our recent multi-million investements in new process equipment and tool upgrades we have enlarged our wafer processing capacity significantly to serve fabless or fablite customers worldwide.

Clients also benefit from our vast experience in lab-to-fab services, our strong network and the quick availability of our semiconductor consumables screening platform capabilities.

The two sites plan to post the tool map on their customer websites to allow small businesses to plan their path to product introduction earlier in the prototype stages of their work.

Fraunhofer-Gesellschaft is the leading organization for applied research in Europe. Its research activities are conducted by 72 institutes and research units at locations throughout Germany. The Fraunhofer IPMS is located in Dresden, Germany, where it maintains two cleanroom facilities.

For specific requests at Fraunhofer IPMS solutions on 200mm or 300mm, please contact: Martin Landgraf, phone +49 351 2607-3004, [email]

The Cornell NanoScale Science and Technology Facility (www.cnf.cornell.edu) operates a 17,000 sq. ft. clean room facility at Cornell University in Ithaca, NY. CNF is an open multi-user facility operated with funding from the National Science Foundation, NYSTAR Empire State Development, and Cornell University. For further information, contact [email]


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