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  Cornell NanoScale Science and Technology Facility
2017-2018 Research Accomplishments

(2018cnfRA.pdf, a 6MB file)

The links below will take you to PDFs of the reports, unless otherwise noted. The files are between 205K and 9.2MB. If you find a broken link, please email Ms. Melanie-Claire Mallison. If you prefer a hard copy of this publication, please email Ms. Mallison with your request and include your complete street address.

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COVER PHOTO CREDIT: The cover images were used with permission from: 1239-04, Suh, Figure 3, page 68; 1872-10, Rey, Figure 1, page 22; 2065-11, Windsor, Figure 2, page 30; 2214-13, Jadhav, Figure 3, page 32; 2350-15, Shin, Figure 3, page 82; 2406-15, Liu, Figure 1, page 164; 2461-16, De Micheli, Figure 1, page 46; 2471-16, She, Figure 3, page 168; 2499-16, Jovanovic, Figure 2, page 172; 2502-16, Pajoumshariati, Figure 1, page 52; 2574-17, Roberts, Figure 3, page 56; 2641-18, Manzer, Figure 2, page 62.


Table of Contents by Section

Biological Applications, pages 2-63

Topics in Nano-Biophotonics: Fabrication of Plasmonic Metasurfaces that Attract and Spectroscopically Interrogate Cancer Cells, page 2
Microfluidic Mixer for Time-Resolved Single-Molecule Fluorescence Experiments using Flip-Chip Bonded SU-8 Structures, page 4
Body-on-a-Chip Systems for Drug Development, page 6
Micropillar-Based Microfluidic Device for Cell Capture and DNA Analysis, page 8
The Number of SNARE Complexes Changing Conformation in Vesicle Fusion Events, page 10
Nanoneedles for Intracellular Measurements, page 12
MoS2 Pixel Sensors for Optical Detection of Redox Molecules, page 14
Silicon Nitride Cantilevers for Muscle Myofibril Force Measurements, page 16
DNA Unzipping by Resonator-Based nSWATs, page 18
Generalized Platform for Antibody Detection Immunosensor, page 20
Development of a Salivary Microfluidic Diagnostic Device Using Hot Embossing, page 22
Rapid Detection of Antimicrobial Susceptibility at the Point-of-Care, page 24
An in vacuo Microfluidic Mixer for Biological X-Ray Solution Scattering, page 26
Biomechanics of Bacteria, page 28
Design and Application of Microfluidic Devices to Study Cell Migration in Confined Environments, page 30
Zero-Mode Waveguides on Thin SiN Membranes for Efficient Single-Molecule Sequencing, page 32
Microfabricated Devices for Cell Organization, page 34
Electrochemical Detection Array Combining Amperometry and Total Internal Reflection Fluorescence, page 36
Microfluidic Device for Studying HABs, page 38
Chip-Based Frequency Combs for High-Resolution OCT, page 40
Handheld Chem/Biosensor Combining Metasurfaces and Engineered Sensor Proteins to Enhance SPR, page 42
Scalable Sensor Array Platform for Analysis of Quantal Transmitter Release Events, page 44
Droplet-Microfluidic Device for Stem Cell Culture, page 46
Metasurfaces for Infrared Spectroscopy of Live Cells in a Microfluidic Chamber, page 48
Listeria Sensor Chip via SPR, page 50
Gut-on-a-Chip using Microfluidic Devices, page 52
Retinal Implant Project, page 54
Disseminating Glycocalyx Biopolymer-Induced Microvesicle Shedding through Nanoparticle Tracking Analysis and Cryo-Electron Microscopy, page 56
Investigation of the Mechanical Property of Drosophila Mature Oocytes using Microfluidic Devices, page 58
Rapid Point of Care Diagnostic for Sepsis Stratification, page 60
Patterning of Native Proteins in Supported Lipid Bilayers, page 62

Chemistry, pages 64-79

Fabricating 2D Silica with Atomic Layer Deposition, page 64
Attonewton Sensitivity Magnet-Tipped Cantilevers and Sample Preparation for Single-Electron Spin Detection, page 66
Investigation of Area Selective Atomic Layer Deposition with Microreactor and in situ Surface Analysis, page 68
Chemical Bonding Across the Periodic Table at High and Ambient Pressures, page 70
Substrate Preparation for Ultrafast Vibrational Spectroscopy Experiments, page 72
A Thin Film Transfer Sample Preparation Technique for Single-Electron Magnetic Resonance Imaging, page 74
Study on the Electrochemically Stabilizing Effect of the High Dielectric Constant Oxide Artificial Solid Electrolyte Interphase on Electrodes in Aqueous Electrolytes, page 76
Measuring Refractive Index of Microscopy Slides, page 78

Electronics, pages 80-95

Vertical Tunneling Field Effect Transistors (Thin-TFETs) Based on BP/SnSe2 Heterostructure, page 80
Self-Assembled Silica Nano-Spheres for Dual Metal Junction-Barrier-Schottky Diodes, page 82
Room Temperature Microwave Oscillators Enabled by Resonant Tunneling Transport in III-Nitride Heterostructures, page 84
MBE Grown NPN GaN/InGaN HBTs on Bulk-GaN Substrates, page 86
Fabrication of GaN Quantum Well HEMTs, page 88
MoS2/PtSe2 MOSFETs and CMOS Integration, page 90
Fabrication of FETs Based on La-BaSnO3 Perovskite Oxide, page 92
Micro-Scale Opto-Electrically Transduced Electrodes (MOTEs), page 94

Materials, pages 96-131

New Photopatterning Materials for Advanced Lithography, page 96
Electrical Characterization of In2Ga2ZnO7 Crystallized by Millisecond Heating, page 98
Fused Silica Substrate and Silicon Absorber Film for use in Laser Spike Annealing (LSA), page 100
Metal-Organic Complex Photoresists, page 102
Zinc-Based Nanoparticle Photoresist for Extreme Ultraviolet Lithography, page 104
Critical Size for Bulk-to-Discrete Transition in 2D Layers: Abrupt Size Effect Observed via Calorimetry and Solid-State NMR, page 106
Manipulating and Controlling Graphene Adhesion, page 108
Transient Laser Heating Derived Mesoporous Materials Directed by Gyroidal Templates from Block Copolymer Self-Assembly, page 110
Three-Dimensional Printing of Hierarchical Porous Architectures, page 112
Three-Dimensional Printing of ZnO Macrostructures with Antibacterial Properties and Low Resistivity, page 114
Novel Platform for Characterization of Nanostructured Polymer Brushes, page 116
Materials Characterization Work, page 118
Growth and Characterization of NbN/III-N Heterostructures by Molecular Beam Epitaxy, page 120
Nanotube Transistor Arrays on a TEM Substrate, page 122
Stacking of Van der Waals Hetero-Structures, page 124
Characterization of Hexagonal Boron Nitride Thin Films Grown by Molecular Beam Epitaxy, page 126
Utilizing Polymer Nanofibers in Microfluidic Devices for Liquid Separation Applications, page 128
Silica Glass Micropillar Fabrication, page 130

Mechanical Devices, pages 132-147

Thin Films from Atomic Layer Deposition for Membranes, Metamaterials, and Micromachines, page 132
Graphene-Based Bimorphs for Micron-Sized Autonomous Machines, page 134
NEMS Electrostatic Switch for Near Zero Power RF Wakeup, page 136
Origin of Microlayer in Pool Boiling, page 138
Making a Microfluidic Device to Mimic Flow Through Porous Medium, page 140
Atomic-Scale Origami for the Fabrication of Micron Sized Machines, page 142
A MEMS Repulsive Force Accelerometer, page 144
Microfabrication of Micropillars inside a Microchannel, page 146

Micro-Pin Fin Heat Sinks, page 146a

Optics & Opto-Electronics, pages 148-175

Lithium Niobate Photonic Crystal Nanocavities, page 148
Lithium Niobate Nanophotonic Waveguides for Tunable Second-Harmonic Generation, page 150
Rabi-Like Oscillations in Photon Pair Correlations, page 152
X-Ray Transmission Optics Development, page 154
TiO2 Slot Waveguide for Efficient On-Chip Raman Spectroscopy, page 156
Developing Full Wafer Blazed Grating Fabrication Method Using Stepper , page 158
512-Element Actively Steered Silicon Phased Array for Low-Power LIDAR, page 160
Wide Bandgap Semiconductor Deep UV Devices, page 162
Three-Dimensional Scanner Fabrication, page 164
Development of Single and Double Layer Anti-Reflective Coatings for Astronomical Instruments, page 166
Large Area Electrically Tunable Metalens, page 168
Multi-Resonant Bianisotropic Metagratings for Ultra-Efficient Diffraction of Mid-Infrared Light, page 170
Optical Masks for Imaging Exoplanets with Large Ground-Based Telescopes, page 172
Description of the Exploratory Etching and Electrodeposition Project, page 174

Physics & Nanostructure Physics, pages 176-215

Characterization of Magnetic Thin Films for Actuating Origami Devices, page 176
Development of a MEMS Tool to Study the Physics of Water and Ice, page 178
Nanosecond Spin-Orbit Torque Switching of Three Terminal Magnetic Tunnel Junctions with Low Write Error Rate, page 180
Reduction of the Spin Hall Angle in Oxygen-Doped Beta Tungsten, page 182
Study of Spin-Orbit Torques in Transition Metal Dichalcogenide / Ferromagnet Heterostructures, page 184
Spin Hall Effect in CaRuO3, page 186
Wrapping Microdroplets with Two-Dimensional Materials, page 188
Phase Transition and Equilibrium in Nanoconfinement, page 190
Vortex Dynamics in Nanofabricated Superconducting Devices, page 192
Fabrication of Nanofluidic Cavities for Superfluid 3He Studies, page 194
Fabrication of Nanoscale Josephson Junctions for Quantum Coherent Superconducting Circuits, page 196
Fabrication of Superconducting Devices for Quantum Information Science, page 198
Anomalous Nernst Imaging of Uncompensated Moments in Antiferromagnetic FeRh Thin Films, page 200
Manipulating Topological Spin Textures in Spin-Valve Type Nanopillars, page 202
Diamond-Based Hybrid Quantum Mechanical Systems, page 204
Properties of Isolated Defects in Hexagonal Boron Nitride, page 206
Extreme Light-Bending and Trapping with a Simple Cubic Optical Photonic Crystal, page 208
Development of Scanning Graphene Hall Probes for Magnetic Microscopy, page 210
Gigahertz Surface Acoustic Waves on Periodically Patterned Layered Nanostructures, page 212
Magnetic Imaging of Ionic Liquid Gated Transition Metal Dichalcogenides, page 214

Process & Characterization, pages 216-233

Nanoscale Periodic Features with a 5x Autostep i-line Stepper, page 216
Development of GaN Vertical Trench-MOSFET with MBE Regrown Channel, page 218
Characterization of (AlxGa1-x)2O3 Thin Films Grown on <010> B-Ga2O3 by MBE, page 220
Device Processes and Electrical Characteristics of First 1 kV Ga2O3 Vertical Power Transistors, page 222
Side-Coupled Microfluidics for Biosensor, page 224
Size Characterization of Plasma Membrane Vesicles, Virus Particles, and Microvesicles, page 226
Hard Mask Fabrication from Block Copolymer Templates and Atomic Layer Deposition, page 228
Photocurable Nanoimprint Lithography (P-NIL): An Enabling Technology for MEMS and Nanophotonics, page 230
PS-PMMA Block Copolymer Lithography for Sub-25 nm Periodic Features, page 232

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