2012 NNIN ALD Symposium at Harvard CNS

2012 NNIN
ALD Symposium
at Harvard CNS

Thursday and Friday
November 29 and 30, 2012

Harvard University Center for Nanoscale Systems
LISE Bldg. 11, Oxford St., Cambridge, MA

Please Note: DAY 1 is for NNIN Staff ONLY. DAY 2 is for Vendors, NNIN Personnel, and ALD Users. Both days are free to registered participants, and will run from 8:30 a.m. to approximately 4:30 p.m.

Day 1 (details)

A one-day NNIN staff "current status" review of NNIN ALD systems and capabilities at the various NNIN sites, with plenty of time for informal "shop talk."

NNIN site will present a short overview of their site's current ALD status, including a few slides with some salient details about their systems and process capabilities. We will then compile a spreadsheet "database" of NNIN ALD capability, to act as a guide to users who come to any NNIN site with specific needs. This will also serve as a template for similar entries in a broad "NNIN process capability" database, ultimately covering other processes such as dry etching, CVD and PVD deposition, etc.

Day 2 (details)

A series of brief ALD vendor presentations, three invited talks by noted experts in the field of ALD, and a ~2 hour ALD User Seminar, where we will present a short review of the "Day 1" results, with a re-presentation of one or two highlights of current staff work at NNIN sites, and a Q&A session.

Food.
Breakfast and lunch will be provided on both days. Vegetarian options will be available, but please let us know if you have any dietary restrictions.

Accommodations.
There is the usual complement of hotels within walking distance (not more than 1/2 hour), including the Sheraton Commander, The Inn at Harvard, The Charles Hotel, etc. Also, there several B&Bs within a few hundred yards of the symposium rooms. Contact them for availability: The Irving House, The Harding House, and A Bed and Breakfast in Cambridge.

Map.
NNINaldMAP.jpg, a map of the symposium locale.

Registration.
While this symposium is free, we ask that you register online by Monday, November 26th, to facilitate our planning.

Symposium Organizers.
Mac Hathaway, Harvard (email)
Vince Genova, Cornell (email)
Michelle Rincon, Stanford (email)

DAY 1 DETAILS Thursday, November 29, 2012

FOR NNIN STAFF ONLY
A one-day NNIN staff "current status" review of NNIN ALD systems and capabilities at the various NNIN sites, with plenty of time for informal "shop talk."

This event will be held at 353 North West Lab (see Map above)

We will start at 8:15 a.m. with breakfast and registration. The symposium itself will start with the first presentation at 9:00 a.m. We'll end with the last presentation at approximately 2:30 p.m., followed by a lab tour, XPS sampling, and dinner on the town. The NNIN is providing all the meals, including dinner.

Also. Here are the instructions for getting a parking pass at Harvard:

1. Go to: http://www.uos.harvard.edu/transportation/
2. Select "online tools" on the left hand side of screen
3. Click on "One-Day Online Permit"
4. Click "Visitor"
5. Select "Click Here To Register"
6. Complete the Login Information section of the Account Registration Page
7. When filling in the Personal Profile section, choose Center for Nanoscale Systems from the pull down list for Dept. -- the Dept. code is 3070. You will need to remember this code as you will need it anytime you purchase a parking permit.
8. Once in the system, you should be able to follow the prompt to complete your purchase. The 52 Oxford St., 10 Everett St. and Broadway are the closest garages to the LISE building. The cost per day is $14.00 - If you arrive after 5:00 pm you can park in the SEAS lot behind LISE building for $5.00.

DAY 2 DETAILS for Friday, November 30, 2012

A series of brief ALD vendor presentations, three invited talks by noted experts in the field of ALD, and an ~2-hour ALD User Seminar, where we will present a short review of "Day 1" results, with a re-presentation of one or two highlights of current staff work at NNIN sites, and a Q&A session.

This event will be held in Room #1, in the basement of William James Hall (see Map above), Harvard University, Cambridge, MA.

We will start at 8:00 a.m. with a light breakfast and registration. The symposium itself will start with the first presentation at 8:30 a.m. The complete schedule for the day is here in PDF, 2012NNIN_ALDSymposiumDay2.pdf

Please note that parking is very tight on campus, so it is best to walk onto campus, if possible. There is very limited on-street parking available. Also, Bus #1 leaves from the vicinity of the MRS Conference (on Mass. Ave.) and goes directly to Harvard Square (at the south edge of the attached map). The bus takes ~ 20 minutes and costs $2 (have exact change).

Also. Here are the instructions for getting a parking pass at Harvard:

1. Go to: http://www.uos.harvard.edu/transportation/
2. Select "online tools" on the left hand side of screen
3. Click on "One-Day Online Permit"
4. Click "Visitor"
5. Select "Click Here To Register"
6. Complete the Login Information section of the Account Registration Page
7. When filling in the Personal Profile section, choose Center for Nanoscale Systems from the pull down list for Dept. -- the Dept. code is 3070. You will need to remember this code as you will need it anytime you purchase a parking permit.
8. Once in the system, you should be able to follow the prompt to complete your purchase. The 52 Oxford St., 10 Everett St. and Broadway are the closest garages to the LISE building. The cost per day is $14.00 - If you arrive after 5:00 pm you can park in the SEAS lot behind LISE building for $5.00.

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This material is based upon work supported by the National Science Foundation under Grant No. ECS-0335765. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

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