DATE
November 15
Thursday
|
Edwards' Vacuum Technology and Semiconductor Process Workshop
A one-day complementary Edwards' technical workshop.
This workshop is free and open to the Cornell University community, along with the general public. Please preregister online at http://www.cnf.cornell.edu/cnf_workshopreg.html, no later than November 7th*.
|
Workshop
Description
|
Time
| |
Morning
Session:
Vacuum Workshop
|
| |
1. Gas Concepts and Vapors
|
9:00
– 9:45 AM
| |
2. Vacuum
ranges/flow types and dynamics, conductance, flow, speed and throughput
viscous, molecular and transitional flow regimes. Surface processes: out-gassing, permeation, leaks and
materials selections: Isolated chambers/vent rates
|
9:45
– 10:45 AM
| |
Break
|
10:45
– 11:00 AM
| |
3. Overview
of primary and secondary pump mechanisms and pump selection (OSRV, boosters, screw, roots/claw and ion, TMP, diffusion, NEG and Cryo).
Vacuum calculations/system design – speeds, vacuum systems, software, process gases
|
11:00
– 12:30 PM
| |
Complementary
Lunch / Open Discussion
|
12:30
– 1:30 PM
| |
Afternoon Session:
Advanced Semiconductor Process Issues
|
| |
4. Overview
of dry pumps on harsh duty semiconductor application. The problems associated with various
applications and pumping challenges.
|
1:30
– 2:00 PM
| |
5. Corrosion
and powder related dry pump studies. Case studies to include fluoride corrosion related dry pump
applications and TEOS based powder problems.
|
2:00
– 2:45 PM
| |
Break
|
2:45
– 3:00 PM
| |
6. Plating
and condensation related dry pump studies. Case studies to include atomic layer deposition (ALD) and
LPCVD silicon nitride.
|
3:00
– 4:30 PM
|
Presenters:
Dr. Andrew Chew; Vacuum (AM) Session
Dr Andrew Chew received his PhD in Vacuum Metrology from University of York, UK in 1993. He has worked within the vacuum industry for over 20 years and currently holds the position of Global Applications Manager at Edwards Vacuum. He specializes in vacuum system design and analysis for large HEP R&D projects and general industrial applications. He maintains an interest in the dynamics of molecule-surface collisions and momentum transfer.
Dr. Anthony Taylor; Semiconductor Applications (PM) Session
Dr Anthony Taylor received his PhD in Physics from Rensselaer Polytechnic Institute in 1993. He has worked within the vacuum industry for 19 years and currently holds the position of Applications Engineer at Edwards Vacuum. He specializes in vacuum systems used in the semiconductor industry and how the process by-products interact with the systems.
Print and Post
PDF FLYER!
Questions on Workshop Content: Vikrant Chidgopkar
Questions on Workshop Logistics: Melanie-Claire Mallison
(* Hot beverages and lunch are included for those who preregister and attend the workshop.) |
