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DATE
November 15
Thursday
     

Edwards' Vacuum Technology and Semiconductor Process Workshop

A one-day complementary Edwards' technical workshop.

This workshop is free and open to the Cornell University community, along with the general public. Please preregister online at http://www.cnf.cornell.edu/cnf_workshopreg.html, no later than November 7th*. 

 

Workshop Description

Time

Morning Session:
  Vacuum Workshop

 

1.   Gas Concepts and Vapors

9:00 9:45 AM

2.   Vacuum ranges/flow types and dynamics, conductance, flow, speed and throughput viscous, molecular and transitional flow regimes.  Surface processes: out-gassing, permeation, leaks and materials selections: Isolated chambers/vent rates

9:45 10:45 AM

Break

10:45 11:00 AM

3.   Overview of primary and secondary pump mechanisms and pump selection (OSRV, boosters, screw, roots/claw and ion, TMP, diffusion, NEG and Cryo). Vacuum calculations/system design speeds, vacuum systems, software, process gases

11:00 12:30 PM

      Complementary Lunch / Open Discussion 

12:30 1:30 PM

Afternoon Session:
  Advanced Semiconductor Process Issues

 

4.   Overview of dry pumps on harsh duty semiconductor application.  The problems associated with various applications and pumping challenges.

1:30 2:00 PM

5.   Corrosion and powder related dry pump studies.  Case studies to include fluoride corrosion related dry pump applications and TEOS based powder problems.

2:00 2:45 PM

Break

2:45 3:00 PM

6.   Plating and condensation related dry pump studies.  Case studies to include atomic layer deposition (ALD) and LPCVD silicon nitride.

3:00 4:30 PM

 

Presenters:

Dr. Andrew Chew; Vacuum (AM) Session
Dr Andrew Chew received his PhD in Vacuum Metrology from University of York, UK in 1993. He has worked within the vacuum industry for over 20 years and currently holds the position of Global Applications Manager at Edwards Vacuum. He specializes in vacuum system design and analysis for large HEP R&D projects and general industrial applications. He maintains an interest in the dynamics of molecule-surface collisions and momentum transfer.

Dr. Anthony Taylor; Semiconductor Applications (PM) Session
Dr Anthony Taylor received his PhD in Physics from Rensselaer Polytechnic Institute in 1993. He has worked within the vacuum industry for 19 years and currently holds the position of Applications Engineer at Edwards Vacuum. He specializes in vacuum systems used in the semiconductor industry and how the process by-products interact with the systems.

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Questions on Workshop Content: Vikrant Chidgopkar
Questions on Workshop Logistics: Melanie-Claire Mallison

 (* Hot beverages and lunch are included for those who preregister and attend the workshop.) 

 
TIME
AM Session: 9 AM - 12:30 PM
PM Session: 1 PM - 4:30 PM
 
LOCATION
700 Clark Hall
Cornell Campus
 
WHO SHOULD ATTEND
  • Graduate Students
  • Researchers
  • Post-Docs
  • Professors
  • Purchasing
 
PREREQUISITES
General scientific /
engineering background
 
REGISTRATION
Pre-Register Online
By November 7th

Seating is limited; if you would like to attend, register today!

Sign up for a 1/2 day morning or afternoon or for the full day workshop.



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