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CNF Lab and Equipment Information
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Hamatech-Steag Mask Processors
Automated Tools for Processing Photomasks 
Manager: Edward Camacho
Backup: Garry Bordonaro
Equipment Training
Online video training is available for these tools by following the links below. After watching the training video you are authorized to use the tools. Contact staff if you still have any questions. Description:The CNF has a Hamatech-Steag HMP900 Mask processing system available for automatic mask developing and etching. There are currently 5 inch mask chucks available. Standard mask development processes and chrome etching should be done on this tool. Additional Resources:Equipment Information SheetTraining Video Back to Top |
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PHOTOLITHOGRAPHY
5X g-line Stepper ABM Contact Aligner ASML 300C DUV Stepper Autostep i-line Stepper EV620 Contact Aligner Fusion UV Cure Gamma Automatic Coat-Develop Tool Hamatech-Steag Mask Processors Hamatech-Steag Wafer Processors Heidelberg Mask Writer DWL2000 JBA 1000 Photoresist UV Cure Karl Suss RC-8 Manual Resist Spinners Nanoimprint NX-2500 PG Mask Writer Resist Hot Strip Bath SU-8 Hotplates Suss MA6-BA6 Contact Aligner YES Image Reversal Oven YES Polymide Bake Oven YES Vapor Prime Oven Back to Equipment List |
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This material is based upon work supported by the National Science Foundation under Grant No. ECS-0335765. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation. Cornell NanoScale Science & Technology Facility (CNF) 250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700 Voice: 607-255-2329, Fax: 607-255-8601, Email: information@cnf.cornell.edu Powered by ITX |
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