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PT720-740 Etcher

PlasmaTherm720/740 Chlorine-based RIE system for Silicon & Aluminum etching

PlasmaTherm SSL-720
Manager: Tom Pennell
Backup: Jerry Drumheller , Vince Genova

Description:

The 720/740 is a dual chamber loadlocked system. The right 720 side is for silicon etching with an oxide mask. The left 740 side is for aluminum etching with either a PR or oxide mask. Either chamber can accomodate up to 200mm wafers. Pieces can also be processed, using a fused silica carrier wafer for the right side and a sapphire wafer carrier wafer for the left side.

Capabilities:

  • Chlorine based gases: Cl2, BCl3. Fluorine based : SF6, CF4. Methane
  • Load locked sample introduction
  • Up to 8 inch wafer capability
  • Turbomolecular pumping


Additional Resources:

Etch Baseline Data
Location of tool in cleanroom (jpg)


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