ComputingCleanroom and Equipment StatusCoral - XReporter
Button: Equipment ListButton: MSDS DatabaseButton: Policies & FormsButton: Education & TrainingButton: StaffButton: Events & Seminars Button: Publication Button: About CNF Button: Lab Manual

     Schedule Training   ¦

Glen 1000 Resist Strip

CAC Name: GLEN1000

Oxygen Plasma tool for removal of organics

Glen 1000p Plasma Cleaning System Backup: Vince Genova
Equipment Training
Please contact the tool manager to schedule training.


The Glen 1000 system utilizes a oxygen plasma source for stripping of photoresist and other organics. The tool can be setup to give direct ion bombardment or in a downstream ion mode for lower surface damage.

Additional Resources:

Equipment Information Sheet

Back to Top


Button: Search Button: Search Keywords
Cornell University