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CNF Lab and Equipment Information
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Aura 1000 Resist Strip

CAC Name: AURA1000

Gasonics downstream asher for dry stripping of photoresist

GaSonics Aura 1000 Backup: Christopher Alpha
Equipment Training
Please contact the tool manager to schedule training.

Description:

The Gasonics Aura 1000 utilizes a microwave source to create a stream of reactive oxygen for dry stripping of photoresist downstream from the microwave source. A heat lamp is used to raise the wafer temperature during the stripping process. The tool is setup for cassette to cassette processing of 4-inch wafers. Contact staff for information regarding other wafer sizes.

Capabilities:

  • No exposure of wafers to Ions...No Ion Damage.
  • Fully automated.
  • Robotic Cassette to Cassette wafer handling.
  • Typical one to two minute per wafer Processing.
  • Capable of up to 4 micron per minute removal for soft baked resist.


Additional Resources:

Equipment Information Sheet


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New Digital Timers Robic Timers
Jul 21, 2015
The CNF has purchased about a dozen new Digital Robic Three Memory Timers. These are to be used by all users in the lab. They have three alarm set points, large LCD display with count up and countdown functionality and magnetic. Remember that they are property of CNF and are labeled as such. They are not to be kept in your tool boxes or your group's storage. Please keep them away
from direct contact with acids, bases, solvents or any chemistry that will bind or destroy the LCD display and butt ...more

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