GCA 5x Stepper
GCA 6300 DSW Projection Mask Aligner, 5X g-line Stepper
Manager: Garry BordonaroBackup: Michael Skvarla , Edward Camacho
This projection printer uses a g-line (436nm) lens column ( 0.30 N.A.) to provide a 5:1 reduction with a variable field size up to 15mm square. Minimum feature size is <0.9µm. The number and placement of the dies is programmable. Wafer size of 3" up to 150mm can be accommodated, as well as smaller pieces. A customized hand-held chuck system allows rapid change of substrate size. Registered alignment is typically <0.25µm. 5" x 0.090"-thick masks are used. This instrument can be easily converted to function as a GCA 3696 Photorepeater system for exposing photoresist coated glass plates up to 7".
Additional Resources:Alignment Mark GDS File
Fiducial Mark GDS File
GCA Stepper Operation Notes
5X Resist Matrix
Back to Top
This material is based upon work supported by the National Science Foundation under Grant No. ECCS-15420819. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.
Cornell NanoScale Science & Technology Facility (CNF)
250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700
Voice: 607-255-2329, Fax: 607-255-8601, Email: email@example.com
Powered by ITX