ComputingCleanroom and Equipment StatusCoral - XReporter
Button: Equipment ListButton: MSDS DatabaseButton: Policies & FormsButton: Education & TrainingButton: StaffButton: Events & Seminars Button: Publication Button: About CNF Button: Lab Manual

CNF Lab and Equipment Information
     Schedule Training   ¦



2. SC4500 Even-Hour Evaporator

CAC Name: SC4500 Even

CVC SC4500 E-gun Evaporation System for deposition of thin films

CVC SC4500
Manager: Aaron Windsor
Backup: Rob Ilic
Equipment Training
Training is requested by appointment via e-mail to windsor@cnf.cornell.edu.

Description:

This cryopumped evaporator contains a 6 pocket electron gun source. The rotation pocket ensures that all evaporations occur from the same point leading to accurate lift-off patterning. Source materials include a variety of metals, semiconductors, as well as silicon dioxide & alumina. Pump down times are generally in the 30 - 45 minute range with total processing time under 2 hours.

NOTE: CNF will no longer be supplying crucibles for use in Aluminum e-gun evaporations. The user community has not shown careful use of these crucibles and as a result will need to buy or supply their own. Please contact Aaron or Rob BEFORE you need one for details.

Carbon $60 Inter-metallic $200

Capabilities:

  • Cryopumped
  • 6 pocket e-gun, 10 KW
  • Optimized for lift off
  • Variable Tilt stage for angled evaporation


Additional Resources:

Equipment Information Sheet


Back to Top

ALD service scheduled extended to May 24
May 17, 2013
The system will be unavailable until May 24.
Notice Archive

EQUIPMENT LIST
THIN FILM DEPOSITION

1. SC4500 Odd-Hour Evaporator
2. SC4500 Even-Hour Evaporator
AJA Sputter Deposition
CHA Evaporator
CVC Sputter Deposition
Electroplating Tanks
GSI PECVD
Oxford ALD FlexAL
Oxford PECVD
Parylene Deposition
PVD75 Sputter Deposition
ReynoldsTech Conductive Polymer Vapor Deposition Tool

Back to Equipment List



Button: Search Button: Search Keywords
Cornell University
NYSTARNNINNSF

This material is based upon work supported by the National Science Foundation under Grant No. ECS-0335765. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

Cornell NanoScale Science & Technology Facility (CNF)
250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700
Voice: 607-255-2329, Fax: 607-255-8601, Email: information@cnf.cornell.edu
Powered by ITX