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Olympus Confocal Microscope

Olympus BX60/U-CFU Real Time Confocal Microscope

Olympus Confocal Microscope Backup: Garry Bordonaro


The Olympus BX60/U-CFU microscope employs a newly developed slit method scanning disk that blocks defocused reflected light from samples and allows only focused light to go through. It generates clear and high resolving images with 0.18-micron compatibility. A mercury lamp house is the standard light source, which provides a bright, clear image. The U-CFU has excellent Z-axis (vertical) detection. A layer in a multi-layer wafer can be observed distinguishably through this capability. (Photo below is linked to 300 dpi version.)


Comparison of white light images of MEMS structures versus confocal images taken on the BX60.

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