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SEM Sample Prep Sputtering System

Small chamber sputtering systems for coating SEM samples

SEM Sample Sputter System
Manager: Jerry Drumheller
Backup: Aaron Windsor

Description:

The CNF has two small sputter systems for coating samples prior to SEM imaging or electron beam lithography. One machine is setup for Gold while the other system is setup for Gold / Palladium. The manual machines allow for quick coating of conductive films to assist in electron beam work.




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This material is based upon work supported by the National Science Foundation under Grant No. ECS-0335765. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

Cornell NanoScale Science & Technology Facility (CNF)
250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700
Voice: 607-255-2329, Fax: 607-255-8601, Email: information@cnf.cornell.edu
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