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SEM Sample Prep Sputtering System

Small chamber sputtering systems for coating SEM samples

SEM Sample Sputter System Backup: Aaron Windsor
Equipment Training
Please contact the tool manager for training.


The CNF has two small sputter systems for coating samples prior to SEM imaging or electron beam lithography. One machine is setup for Gold while the other system is setup for Gold / Palladium. The manual machines allow for quick coating of conductive films to assist in electron beam work.

Additional Resources:

Equipment Information Sheet

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