CNF - Lab and Equipment Information

CNF Lab and Equipment Information

Schedule Training ¦

Dicing Saw - KS 7100

CAC Name: WAFER_SAW

K&S 7100 Dicing Saw

Manager: Rob Ilic

Backup: Sam Wright

Equipment Training
Training for operation of dicing saw is offered by appointment. Blade change training is offered for experienced users. Once you have used the dicing saw successfully at least 10 times in a period of the last 6 months of the request, please contact the tool manager for this training.

There are no training sessions currently scheduled.

Description:

K&S 7100 is a dicing saw capable of handling 6 inch substrates with a thickness of up to 1.25 mm. Applications that have benefited from the K&S 7100 approach include the dicing of silicon, bonded Si wafers, and all types of glasses. Please contact the staff for details.

Capabilities:

2” Front-mount Spindle
air driven DC brushless with closed-loop control
60,000rpm max
Optimized for simple and tight tolerance products up to 6”x 6”
Closed-loop, Y-axis linear encoder
Non-contact, optical height sensing
Pattern Recognition System with auto-focusing & programmable illumination

Processes Available:

With the following blade change schedule we hope to satisfy the needs of as many users as possible:

Sunday: all purpose blade (cuts all types of glasses and silicon)
Monday: all purpose blade
Tuesday: all purpose blade
Wednesday: S1235 blade (cuts silicon only), change will be between 8-10 am in the morning
Thursday: S1235 blade
Friday: Change to all purpose blade between 10am-12noon
Saturday: all purpose blade

We will offer blade change trainings to experienced users who wish to be independent of this schedule. Please contact us if you have any concerns and further suggestions!

Additional Resources:

Equipment Information Sheet

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This material is based upon work supported by the National Science Foundation under Grant No. ECS-0335765. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

Cornell NanoScale Science & Technology Facility (CNF)
250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700
Voice: 607-255-2329, Fax: 607-255-8601, Email: information@cnf.cornell.edu