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Suss MJB4 Contact Aligner

Suss MicroTech MJB4 Contact Lithography Exposure Tool

EV620 contact aligner
Manager: Edward Camacho
Backup: Garry Bordonaro

Description:

The MJB4 contact aligner can be used for Topside Alignment and Backside Infrared Alignment on substrate sizes ranging 5mm square to 100mm in diameter. It is capable of printing .5um lines and spaces with a light source of wavelength range between 350 and 450nm. This light source is controlled by constant intensity power supply. This contact aligner has 5 exposure modes; Soft Contact, Hard Contact, Vacuum Contact, Soft Vacuum Contact and Gap Exposure. Alignment travel range for X and Y is +/- 5mm and 5 degrees for theta.

Capabilities:

  • Topside and backside alignment
  • Topside and backside alignment
  • Wavelength from 350nm - 450nm
  • Minimum 0.5um line/space


Additional Resources:

Contact Lithography Alignment Keys
Contact Aligner Resist Matrix


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This material is based upon work supported by the National Science Foundation under Grant No. ECCS-1542081. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

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