JEOL JBX-9300FS Electron Beam Lithography System - RETIRED
Manager: Daron WestlyBackup: Rob Ilic
This tool is no longer available. It is currently being replaced by the JBX9500 due to come online sometime in March or April.
Additional Resources:Quick Start Instructions
Operating System Overview
Electron Beam Resist Spin Curves
Back to Top
This material is based upon work supported by the National Science Foundation under Grant No. ECCS-0335765. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.
Cornell NanoScale Science & Technology Facility (CNF)
250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700
Voice: 607-255-2329, Fax: 607-255-8601, Email: email@example.com
Powered by ITX