JEOL JBX-9300FS Electron Beam Lithography System - RETIRED
Manager: Daron WestlyBackup: Rob Ilic
This tool is no longer available. It is currently being replaced by the JBX9500 due to come online sometime in March or April.
Additional Resources:Quick Start Instructions
Operating System Overview
Electron Beam Resist Spin Curves
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This material is based upon work supported by the National Science Foundation under Grant No. ECCS-0335765. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.
Cornell NanoScale Science & Technology Facility (CNF)
250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700
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