Wet/Dry Oxide - B2
MRL Industries Furnace for oxidation of silicon substrates
Manager: Phil InfanteBackup: Aaron Windsor , Daniel McCollister
The Thermal Oxidation Furnace is an atmospheric furnace with a 40” flat zone capable of processing up to 6” diameter wafers. The furnace tube is equipped with an external torch for pyrogenic wet oxidation, high and low O2 flow controllers for dry oxidation and O2/inert mixtures, as well as N2 and Ar anneal ambient. Samples are restricted to silicon based materials only.
Additional Resources:Oxide Furnace Growth Curves
B2 Oxide Furnace Instructions
Location of tool in cleanroom (jpg)
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This material is based upon work supported by the National Science Foundation under Grant No. NNCI-1542081. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.
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