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Bruker (Veeco) Dektak 6M profilometer

CAC Name: Dektak

Tool for measuring step heights and surface roughness

Dektak 6M profilometer
Manager: Xinwei Wu
Backup: Jeremy Clark
Equipment Training
Training is offered once per week. Please sign up online for training. On the CNF users web site, click on the EDUCATION & TRAINING tab, then click Training Schedule and Scheduler. Sign up for Dektak profilometer training. (Please ignore any message below that states ¨There are no training sessions currently scheduled.¨)
There are no training sessions currently scheduled.


Profilometry allows users to get a 2D trace of surface topographic features through contact with a stylus. The Dektak profilometer determines film thickness, feature heights in microfluidic devices, 3D-printed devices or feature depths in laser cut samples. It can also show the surface roughness of substrates.


  • Measurement Range: 100 Angstrom to 1 mm deep.
  • Resolution: 1-200 Angstroms depending on measurement range
  • Sample size: up to 150 mm (6
  • Scan length: 50 to 30,000 microns
  • 12.5 and 25 micron-wide stylus available
  • Stylus force range: 1 to 15 mg.
  • X-Y stage translation: 20 x 80 mm, rotates 360 degrees.
  • Photo capability with 70 to 280 X camera (3.5 to 0.86 mm field of view)

Processes Available:

  • Measurement parameters available:
  • Roughness (Ra, Rq, Rp, Rv, Rt, Rz)
  • Waviness (Wa, Wq, Wp, Wv, Wt)
  • Step Height (avg. step ht., avg. ht., max. peak, max. valley, max. ht., peak to valley, high spot count, peak count)
  • Geometric measurements (area, slope, volume, radius, perimeter, bearing, ratio, Sm)
  • Measures hard or soft (elastomer) substrates

Additional Resources:

Equipment Information Sheet
Tool manual
Tips for measuring soft elastomer substrates

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