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Edge Bead Removal System

EBR System

EBR System Backup: Garry Bordonaro
Equipment Training
Training upon request.

Description:

This Edge Bead Removal System uses a Brewer Science Cee Flange Spinner Model 200 platform along with a Nordson 752 Series Diaphragm Dispense Valve and their patented BackPack valve actuator controlled by their ValveMate 8000 Controller. The nozzle is mounted on a 4-axis cantilevered T-Slot arm with position micrometer on the X-axis for adjusting the bead size. It utilizes Microposit EBR 10A as a solvent.

Capabilities:

This setup can accommodate 51mm to 150mm standard size substrates, but the default is 100mm.

Processes Available:

An EBR recipe is available and it consists of process steps.

Step 1: 300 RPM [Speed], 400 RPM/Sec [Acceleration], 20 Sec [Step Time], #2 [Dispense]
Note that Dispense time will be 18 seconds

Step 2: 2000 RPM [Speed], 1400 RPM [Acceleration], 15 Sec [Step Time]

Note: One might need to run this recipe multiple times depending on the thickness of the resist.

Applications:

The clean edge prevents failure and contamination in exposure, reactive ion etch and thin film deposition.


Additional Resources:

Equipment Information Sheet

Results:


Cleaned on the system.


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