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Brewer Science 300 mm Hot Plate

CAC Name: 300 mm Hot Plate

Backup: Amrita Banerjee
Equipment Training
Equipment Training: Use of hot plates is covered in the general photolithography training held ever week on Tuesday at 1:30pm in the photolithography area. If there is no general photolithography training scheduled, contact the tool managers by email for a short training session.

Description:

General use hot plate for large substrates.

Capabilities:

Hot plate for heating 300 mm wafers, and also other large substrates such as large glass plates used for displays.




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