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P7 Profilometer

CAC Name: P7

Micro contact method for measuring surface topology on a nanometer or micron scale.

Backup: Jeremy Clark , Beth Rhoades
Equipment Training
Training is scheduled as needed. Please e-mail requests to the tool manager. Training takes about a half hour.


A profilometer is a precision metrology tool used to measure surface characteristics in the micron to nanometer scale. It is an ideal tool for measuring step heights. This is useful for measuring film thickness, etch depth, surface roughness, wear-scar measurements. Many parameters of surface roughness and waviness can be measured. The P-7 is a stylus-based surface profiler, with motorized XY stage with vacuum hold down, and a wide range of scan parameter settings.


  • 0.1 Angstrom or less vertical resolution.
  • 1024 µm maximum vertical dynamic range.
  • 300 µm maximum step up.
  • 1 µm to 150 mm scan length.
  • 2 µm/sec. to 25mm/sec. scan speed.
  • 4 different image magnifications.

Processes Available:


Additional Resources:

Equipment Information Sheet

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