ComputingCleanroom and Equipment StatusCoral - XReporter
Button: Equipment ListButton: MSDS DatabaseButton: Policies & FormsButton: Education & TrainingButton: StaffButton: Events & Seminars Button: Publication Button: About CNF Button: Lab Manual

CNF Lab and Equipment Information
Report Trouble   ¦    View Open Trouble   ¦    Schedule Training   ¦

SUEX/ADEX Laminator

CAC Name: Class II laminator

Laminator for SUEX and ADEX sheets

Manager: Tom Pennell
Backup: Beth Rhoades
Equipment Training
30- to 45-minute training sessions are held on an 'as needed' basis. Contact Beth by email to schedule. Training should be taken within 2 weeks of starting your process. NO EXCEPTIONS!


Laminates pre-cast (dried) photosensitive polymer sheets (SUEX or ADEX) to wafers, acrylic and other substrates.


Pre-cast polymers supplied by DJ DevCorp:
SUEX sheets 100 to 500 microns thickness (similar to SU-8)
ADEX sheets 5 to 75 microns thickness

Substrates = Si wafers (4-inch or other), acrylic (plexiglass), glass, other rigid substrates.

Processes Available:

CNF currently supplies 100-, 200- ad 500-micron-thick SUEX for 4-inch wafers.

Other thicknesses and shapes can be purchased directly from the manufacturer (see price list attachment).


  • Microfluidic master molds
  • Physical channels and features of microfluidic devices
  • MEMS devices
  • Insulation layer
  • Attaching/gluing layers of devices together

Additional Resources:

Equipment Information Sheet

Back to Top


Button: Search Button: Search Keywords
Cornell University