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SUEX/ADEX Laminator

Laminator for SUEX and ADEX sheets

Manager: Beth Rhoades
Backup: Tom Pennell

Description:

Laminates pre-cast (dried) photosensitive polymer sheets (SUEX or ADEX) to wafers, acrylic and other substrates.

Capabilities:

Pre-cast polymers supplied by DJ DevCorp:
SUEX sheets 100 to 500 microns thickness (similar to SU-8)
ADEX sheets 5 to 75 microns thickness

Substrates = Si wafers (4-inch or other), acrylic (plexiglass), glass, other rigid substrates.

Processes Available:

CNF currently supplies 100-, 200- ad 500-micron-thick SUEX for 4-inch wafers.

Other thicknesses and shapes can be purchased directly from the manufacturer (see price list attachment).

Applications:

  • Microfluidic master molds
  • Physical channels and features of microfluidic devices
  • MEMS devices
  • Insulation layer
  • Attaching/gluing layers of devices together




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