Laminator for SUEX and ADEX sheets
Manager: Tom PennellBackup: Beth Rhoades
Laminates pre-cast (dried) photosensitive polymer sheets (SUEX or ADEX) to wafers, acrylic and other substrates.
Pre-cast polymers supplied by DJ DevCorp:
CNF currently supplies 100-, 200- ad 500-micron-thick SUEX for 4-inch wafers.
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This material is based upon work supported by the National Science Foundation under Grant No. NNCI-1542081. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.
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Cornell NanoScale Science & Technology Facility (CNF)
250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700
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