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Arradiance ALD Gemstar-6

CAC Name: Arradiance ALD

Arradiance ALD

Manager: Vince Genova
Backup: Phil Infante , Jeremy Clark
Equipment Training
Training is done on an as needed basis. Email the tool manager for training. Training typically takes up to 1 hour.

Description:

The Arradiance Gemstar-6 ALD system is a benchtop system capable of depositing highly conformal and uniform dielectric and metal thin films. The films are deposited with thermal ALD processes.

Capabilities:

The Arradiance Gemstar-6 ALD system is a benchtop system capable of depositing highly conformal and uniform dielectric and metal thin films. The films are deposited with thermal ALD processes.

Processes Available:

Processes available are:

- thermal Al2O3
- thermal TiO2
- thermal SiO2
- thermal Pt

Applications:

ALD films are applicable in many areas including advanced microelectronics (transistors), nanophotonics, MEMS, and catalytic applications to name just a few.


Additional Resources:

Equipment Information Sheet


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