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Schott IR Inspector
The Schott IR Inspection Tool is a general all purpose semi-automatic inspection tool for front side, buried layers, and backside inspection. The machine can handle substrates size up to 200mm in Diameter. ![]() Manager: Edward Camacho
Backup: Alan R. Bleier
Description:The Schott IR Inspection Tool is a general all purpose semi-automatic inspection tool for front side, buried layers, and backside inspection. The machine can handle substrates size up to 200mm in Diameter. Capabilities:The Schott IR Inspection currently has three illumination modes; near infrared coaxial illumination, near infrared transmission and near infrared oblique illumination. Other illumination sources can be added in the future. These modes give the machine sub-micron resolution for a variety of applications. Processes Available:
Applications:The Schott IR Inspection can be utilize for void detection and quality of bonds in wafer bonding. In terms of wafer packaging it can be used to inspect interconnects in single layer or in multilevel designs. It also serves as a good way to detect chipping and cracking post-CMP and post-Dicing for top and buried layers. This machine is capable of processing substrates very quickly. Processing time is dominated by image magnification and the size of the substrate. Image stitching and file size are inversely related to those two factors. The Schott IR Inspection ’s broad optical zoom range makes it ideal for layer characterization pre-processing and post-processing. Image storage Results:
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![]() This material is based upon work supported by the National Science Foundation under Grant No. ECCS-1542081. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation. Cornell NanoScale Science & Technology Facility (CNF) 250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700 Voice: 607-255-2329, Fax: 607-255-8601, Email: information@cnf.cornell.edu Powered by ITX |