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Nabity

Nabity ebeam system for Supra

Backup: Amrita Banerjee
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Description:

The Nabity system turns an sem into a simple ebeam system. The hardware takes control of the deflection system on the sem and can then be used to expose patterns in resist. This is particular useful when there is a need for low energy exposures. The tool is very manual, as opposed to the fully automated JEOL systems, and the calibrations are very primitive.

Please talk to staff to determine whether the Nabity is the best choice for your project.

Capabilities:

  • Accelerating voltage from 1keV to 30keV
  • Sample sizes from 3mm to approximately 2cm
  • Maximum beam current of around 300pA


Additional Resources:

Equipment Information Sheet


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