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Critical Point Dryer - Leica

CAC Name: Leica CPD

Leica CPD300 critical point dryer

Manager: Sam Wright
Equipment Training
Please contact the tool manager to schedule a training session.


The Leica CPD300 is a small footprint, easy to use critical point dryer. The touch screen makes editing and running simple and fast. The tool has a maximum substrate size of 2" which minimizes the amount of solvent used and decreases the cycle time.


  • Maximum substrate size of 2


Used for drying MEMS structures after release and preventing pattern collapse of high aspect ratio features.

Additional Resources:

Equipment Information Sheet

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