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JEOL 9500 Alignment Microscope

Alignment microscope for JEOL 9500

Equipment Training
Please contact the tool manager to schedule a training session. Before training you should already have gone through the general ebeam lithography training and be familiar with the operation of the 9500.

Description:

Used for doing pre-alignment of ebeam exposures on the 9500. The stage has encoders that are used to determine the locations of P and Q marks used for aligned exposures. The accompanying software can then be used to calculate the X and Y offsets for use in the schedule file.


Additional Resources:

Equipment Information Sheet


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