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JEOL 9500 Alignment Microscope

Alignment microscope for JEOL 9500

Equipment Training
Please contact the tool manager to schedule a training session. Before training you should already have gone through the general ebeam lithography training and be familiar with the operation of the 9500.


Used for doing pre-alignment of ebeam exposures on the 9500. The stage has encoders that are used to determine the locations of P and Q marks used for aligned exposures. The accompanying software can then be used to calculate the X and Y offsets for use in the schedule file.

Additional Resources:

Equipment Information Sheet

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Zeiss Supra is back up
Mar 14, 2018
The Zeiss Supra SEM communication problem was a side effect of the chiller running out of water. Water has been added and the SEM is back up.


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