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Brewer Automatic Resist Coat

Automatic Wafer Coating and Developing System

Wafer Processing Track System
Manager: Garry Bordonaro
Backup: John Treichler

Description:

The Brewer Science CEE Model 6000 is a modular robotic system designed to allow a high degree of flexibility. The system may incorporate up to 5 processing modules including spincoaters, hotplates and cold plates. Because this is not a linear track system, any process module can be utilized in any order. The Self-Optimizing Process Sequencer system offers high throughput, precise control, monitoring of all processes, and simple convenient operation.

Capabilities:

  • Spin Range: 0 - 6,000 rpm
  • Acceleration: 30,000 rpm/sec. unloaded
  • Time: 0-999 sec./step
  • Prog Steps: 10 steps/program
  • Repeatability: ±5 rpm
  • Resolution: 1 rpm
  • Max. Substrate Size: 200mm




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This material is based upon work supported by the National Science Foundation under Grant No. ECS-0335765. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

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