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ELECTRON-BEAM LITHOGRAPHY
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General Electron Beam Lithography Training

Introduction to electron beam lithography

Backup: Amrita Banerjee
Equipment Training
This training covers the basic theory and fundamentals of the JEOL ebeam systems. Please sign up online at least one day in advance on the CNF users face to face training page http://www2.cnfusers.cornell.edu/facetoface.php . Training will take place only if someone has signed up online at least one day in advance. Once you have gone through this training you will then be able to get trained on one of the ebeam tools. Please see the specific tool page for the JEOL 6300 or the JEOL 9500 for details on machine training.

Description:

General ebeam lithography training covering basic theory and tool fundamentals.


Additional Resources:

Shot pitch and write time estimation spreadsheet
Alignment Marks - Change the Mark Spacing with L-Edit
JEOL Alignment Mark Requirements


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