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CNF Lab and Equipment Information
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SU-8 Hotplates

CAC Name: SU-8 hotplates 1-4

Hotplates for baking SU-8-coated wafers

Manager: Beth Rhoades
Backup: Edward Camacho , Garry Bordonaro
Equipment Training
Training for first time use of the room is required.Contact Beth. Please adhere to the instructions on the Equipment Information Sheet.


9 hotplates are available for baking SU-8-coated substrates in the SU-8 lithography area (clean room 106).

Processes Available:

Hot plates have been grouped and labeled to accommodate both users with long and short bake processes
-3 Fairweather hotplates can be reserved for extended (more than 2 hrs) bake processes.
-3 EMI hotplates are available without reservations for shorted bake processes.
-2 EMI hotplates are available without reservations for bake processes with intermediate times (less than 2 hours).

Additional Resources:

Equipment Information Sheet

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Photolithography Training Sessions for the Week of March 19th
Mar 19, 2018
General Photolithography training will be offered Tuesday at 1:30PM. We will meet in the Spinner room.

Heidelberg DWL2000 Mask Writer Training will be offered Tuesday at 3:30PM. Meet at the tool.

AB-M contact aligner, Schott IR inspection tool, MA6 contact aligner, and Wafer Bonder training can be scheduled with Edward Camacho.


For any other training sessions, this week contact the tool owner for scheduling. Please review the materials available at each of the web pages ...more


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