CAC Name: SU-8 hotplates 1-4

Hotplates for baking SU-8-coated wafers

Description:

9 hotplates are available for baking SU-8-coated substrates in the SU-8 lithography area (clean room 106).

Capabilities:

Processes Available:

Hotplates have been grouped and labeled to accommodate both users with long and short bake processes
-4 Fairweather hotplates can be reserved for extended (more than 2 hrs) bake processes.
-3 EMI hotplates are available without reservations for shorted bake processes.
-2 EMI hotplates are available without reservations for bake processes with intermediate times (less than 2 hours).

Applications:

Additional Resources: