CNF - Lab and Equipment Information

CNF Lab and Equipment Information

Schedule Training ¦

Heidelberg Mask Writer DWL2000

CAC Name: DWL 2000

DWL2000 Laser Pattern Generator and Direct Writer

Manager: Rob Ilic

Backup: John Treichler

Equipment Training
Training is scheduled by need, please email requests for training to the tool manager. Once a need has been established registration for training sessions will be performed over the web. Training classes are limited to 3 users.

Description:

The Heidelberg Instruments DWL 2000 is an economical, high resolution direct write pattern generator for direct writing on photosensitive Cr mask plates. The tool can handle mask sizes from 3 to 9 inches. The unit has an interchangeable write head that can accommodate different feature sizes for writing. The smallest feature size is 0.7 microns and 0.6 microns with the 4mm and 2mm write heads, respectively.

DWL 2000 system consists of the main system unit, an XP-based PC for running job files, a Linux based PC for data conversion and a pattern generator (located in the service chase). The tool accepts files of various format, for best results use the semiconductor standard GDSII format.

Capabilities:

Write Lens 4mm - 0.7um nominal resolution at 110mm^2/min
Write Lens 2mm - 0,6um nominal resolution at 29mm^2/min
Direct write on masks 3 to 9 inches in extent
GDSII pattern files only

Additional Resources:

Equipment Information Sheet

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Photolithograhy Training Sessions for the Week of June 17th
Jun 18, 2013
General Photolithography training will be held Tuesday at 1:30 PM. Meet in the Spinner Room.

MA6 Mask Aligner training session will be held
Wednesday at 10:00AM. Meet in the Contact Aligner Room.

ABM Mask Aligner training session will be held
Thursday at 10:00AM. Meet in the Contact Aligner Room.

PG training will be scheduled based on requests.

Please review the materials available at each of the web pages associated with the tools above.

PLEASE BE ON TIME!
__________
Edwar ...more

SPACE AVAILABLE in Microfluidics Course
Jun 18, 2013
The NBTC is offering a 3-day course covering the design, fab, and assembly of microfluidic devices. The course is offered June 26-28. Contact Teresa Porri if interested. Only a few slots left! 254-5200.

Notice Archive

This material is based upon work supported by the National Science Foundation under Grant No. ECS-0335765. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

Cornell NanoScale Science & Technology Facility (CNF)
250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700
Voice: 607-255-2329, Fax: 607-255-8601, Email: information@cnf.cornell.edu