CNF Lab and Equipment Information
CAC Name: JEOL 6300
JEOL JBX-6300FS 100 kV Electron Beam Lithography System
Manager: Alan R. BleierBackup: John Treichler , Daron Westly
The unique capability of the JEOL 6300 is that a fifth lens can be used to get a smaller beam spot size and write sub-10 nm features. This is the high resolution writing mode. Writing without the 5th lens in 4th lens mode is called the high speed writing mode.
Additional Resources:Equipment Information Sheet
Shot pitch and write time estimation spreadsheet
Offset calculator for aligned exposures
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E beam lithography shutdown for UPS replacement May 30 - June 5
May 23, 2013
The two JEOL electron beam lithography systems will be shut down during the steam shutdown for replacement of the uninterruptible power supply (UPS) that supplies power to both systems. They may be available for use by Wed., June 5, but if there are delays in the UPS installation they may be unavailable for the entire week of June 3 - 7. Another notice will be posted when more information is available about the restart date.
Electron Beam Lithography General Training
May 13, 2013
Every Tuesday from 11:30 am to 2:00 pm in 254 Duffield Hall there will be a general introduction to electron beam lithography, which covers both the JEOL 6300 and the JEOL 9500.
Before attending this training, please supply the information about your project which is requested under Equipment Training on the JEOL 6300 web page, http://www.cnfusers.cornell.edu/cnf5_tool.taf?_function=detail&eq_id=171 .
This session covers tool specifications, radiation safety, pattern conversion software, ...more
Electron beam Resist Spinners
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This material is based upon work supported by the National Science Foundation under Grant No. ECS-0335765. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.
Cornell NanoScale Science & Technology Facility (CNF)
250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700
Voice: 607-255-2329, Fax: 607-255-8601, Email: firstname.lastname@example.org
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