CNF - Lab and Equipment Information

CNF Lab and Equipment Information

Schedule Training ¦

Hamatech Hot SC1/SC2

Automatic Single Wafer Processor for SC-1 & SC-2 cleans

Manager: Edward Camacho

Backup: Garry Bordonaro

Equipment Training
Training for any of the Hamatech covers the training for this tool.

Description:

This Hamatech is a wafer processor is capable of doing a SC-1 (Ammonium Hydroxide and Hydrogen Peroxide) clean and SC-2 (Hydrochloric Acid and Hydrogen Peroxode) on photomasks (4, 5, & 7 inch) and wafers (3, 4, and 6 inch). The DI water gets heated and then it is combined with the process chemistry.

Capabilities:

Processes Available:

Organic Clean (SC1) and Ionic Clean (SC2)

Applications:

Wafer Bonding and Nanoimprint

Additional Resources:

Equipment Information Sheet

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PlasmaTherm service visits
May 03, 2013
PlasmaTherm will have a service engineer on site to perform service on the etch tools. Here is the schedule when the tools will be unavailable:

Week of May 6: PlasmaTherm VLN DRIE - ongoing issue
Week of May 13: PT770
Week of May 20: PT770 & PT720/740

Scheduled updated 4/30 due to delays.

Please plan accordingly.

Notice Archive

This material is based upon work supported by the National Science Foundation under Grant No. ECS-0335765. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

Cornell NanoScale Science & Technology Facility (CNF)
250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700
Voice: 607-255-2329, Fax: 607-255-8601, Email: information@cnf.cornell.edu