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Hamatech Hot SC1/SC2

Automatic Single Wafer Processor for SC-1 & SC-2 cleans

Backup: Garry Bordonaro


This Hamatech is a wafer processor is capable of doing a SC-1 (Ammonium Hydroxide and Hydrogen Peroxide) clean and SC-2 (Hydrochloric Acid and Hydrogen Peroxode) on photomasks (4, 5, & 7 inch) and wafers (3, 4, and 6 inch). The DI water gets heated and then it is combined with the process chemistry.

Processes Available:

Organic Clean (SC1) and Ionic Clean (SC2)


Wafer Bonding and Nanoimprint

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