Hamatech Hot SC1/SC2
Automatic Single Wafer Processor for SC-1 & SC-2 cleans
Manager: Edward CamachoBackup: Garry Bordonaro
This Hamatech is a wafer processor is capable of doing a SC-1 (Ammonium Hydroxide and Hydrogen Peroxide) clean and SC-2 (Hydrochloric Acid and Hydrogen Peroxode) on photomasks (4, 5, & 7 inch) and wafers (3, 4, and 6 inch). The DI water gets heated and then it is combined with the process chemistry.
Organic Clean (SC1) and Ionic Clean (SC2)
Wafer Bonding and Nanoimprint
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This material is based upon work supported by the National Science Foundation under Grant No. ECCS-1542081. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.
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