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Hamatech Hot SC1/SC2

Automatic Single Wafer Processor for SC-1 & SC-2 cleans

Manager: Edward Camacho
Backup: Garry Bordonaro

Description:

This Hamatech is a wafer processor is capable of doing a SC-1 (Ammonium Hydroxide and Hydrogen Peroxide) clean and SC-2 (Hydrochloric Acid and Hydrogen Peroxode) on photomasks (4, 5, & 7 inch) and wafers (3, 4, and 6 inch). The DI water gets heated and then it is combined with the process chemistry.

Capabilities:

Processes Available:

Organic Clean (SC1) and Ionic Clean (SC2)

Applications:

Wafer Bonding and Nanoimprint




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This material is based upon work supported by the National Science Foundation under Grant No. ECS-0335765. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

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250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700
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