CNF - Lab and Equipment Information

CNF Lab and Equipment Information

Schedule Training ¦

YES Polymide Bake Oven

CAC Name: YES POLY

Oven for curing polyimide and other polymer films

Manager: Michael Skvarla

Equipment Training
Training is done through a video over the web. Please select a link below to watch the video. Once you have watched the video you need to contact the tool manager to have your access enabled in CORAL.

Training Video

Description:

The 450PB is a high temperature vacuum oven using a programmable temperature controller and programmed vacuum and nitrogen flow cycles for curing of polyimide films. The unit features filtered heated nitrogen purging from the entire surface of the roof through the floor of the chamber. This flow acts to clean the wafers during the process.

Many thanks to Yield Engineering Systems (YES) for improved controller parameters leading to better temperature control.

Capabilities:

Capacity: Up to two boats of 6 inch wafers
Ramp: 8°C/min
Cool-down: 1-2°C/min
Max Temperature: 400°C
Idle Temperature: 50°C

Additional Resources:

Equipment Information Sheet
YES Polymide Instructions
Training Video - Window Media Player
Training Video - Quicktime

Back to Top

Notice Archive

This material is based upon work supported by the National Science Foundation under Grant No. ECS-0335765. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

Cornell NanoScale Science & Technology Facility (CNF)
250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700
Voice: 607-255-2329, Fax: 607-255-8601, Email: information@cnf.cornell.edu