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YES Polymide Bake Oven

Oven for curing polyimide and other polymer films

YES Polymide Bake Oven
Manager: Michael Skvarla

Description:

The 450PB is a high temperature vacuum oven using a programmable temperature controller and programmed vacuum and nitrogen flow cycles for curing of polyimide films. The unit features filtered heated nitrogen purging from the entire surface of the roof through the floor of the chamber. This flow acts to clean the wafers during the process.

Many thanks to Yield Engineering Systems (YES) for improved controller parameters leading to better temperature control.

Capabilities:

  • Capacity: Up to two boats of 6 inch wafers
  • Ramp: 8°C/min
  • Cool-down: 1-2°C/min
  • Max Temperature: 400°C
  • Idle Temperature: 50°C


Additional Resources:

YES Polymide Instructions
Training Video - Window Media Player
Training Video - Quicktime


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This material is based upon work supported by the National Science Foundation under Grant No. ECS-0335765. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

Cornell NanoScale Science & Technology Facility (CNF)
250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700
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