CNF Lab and Equipment Information
CAC Name: NX2500
Manager: Edward CamachoBackup: John Treichler
The NX-2500 is a multi-level nanoimprintor with imprint capabilities in thermoplastic, photo-curable and embossing. It offers excellent uniformity regardless of backside roughness of substrate and template and can correct waving and bowing of surfaces. This machine also eliminates relative lateral shifting between substrate and mold which affects mold lifetime. A very small thermal mass ensure rapid and cooling, resulting in fast process cycles.
Air Cushion Press, Excellent Uniformity, High Throughput
Thermoplastic, Photocurable, Embossing
Nanophotonics, Displays, Data Storage, Advance Materials, Biotechnology, Nano-fluidics, etc.
Additional Resources:Equipment Information Sheet
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Photolithography Training Sessions for the Week of March 19th
Mar 19, 2018
General Photolithography training will be offered Tuesday at 1:30PM. We will meet in the Spinner room.
Heidelberg DWL2000 Mask Writer Training will be offered Tuesday at 3:30PM. Meet at the tool.
AB-M contact aligner, Schott IR inspection tool, MA6 contact aligner, and Wafer Bonder training can be scheduled with Edward Camacho.
For any other training sessions, this week contact the tool owner for scheduling. Please review the materials available at each of the web pages ...more
ABM Contact Aligner
ASML 300C DUV Stepper
Autostep i-line Stepper
Edge Bead Removal System
Gamma Automatic Coat-Develop Tool
GCA 5x Stepper
Hamatech-Steag Mask Processors
Hamatech-Steag Wafer Processors
Heidelberg Mask Writer DWL2000
Heidelberg Mask Writer DWL66FS
JBA 1000 Photoresist UV Cure
Karl Suss RC-8
Manual Resist Spinners
Photolithography Hot Plates
Resist Hot Strip Bath
Suss MA6-BA6 Contact Aligner
Suss MJB4 Contact Aligner
Suss SCIL Imprint
YES Image Reversal Oven
YES Polyimide Bake Oven
YES Vapor Prime Oven
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This material is based upon work supported by the National Science Foundation under Grant No. ECCS-1542081. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.
Cornell NanoScale Science & Technology Facility (CNF)
250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700
Voice: 607-255-2329, Fax: 607-255-8601, Email: email@example.com
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