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Rapid Thermal Processer - AG8108

Rapid Thermal Processer - AG8

AG8108 Rapid Thermal Processer Backup: Michael Skvarla

Description:

The RTP 8108 is a rapid thermal processing tool capable of rapid thermal annealing and rapid thermal oxidation of 4" and 6" wafers at temperatures of up to 1150 degrees C. The tool is configured with Oxygen, Argon, Forming Gas (2.8% H2, balance Argon) and Nitrogen. Gas flow ranges are up to 10 SLPM.

Applications:

The RTP 8108 is a MOS compatible tool. This tool follows all of the same restrictions that pertain to the MOS diffusion furnaces with respect to cleanliness and materials.




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