Fusion UV Cure
Manager: Edward Camacho
The Fusion M150PC UV Photoresist Stabilizer tool is used for production-level UV curing and thermal processing of post developed photosensitive films. The tool is capable of running 100mm and 150mm wafers in single or in batch mode. Pieces can be run using handle wafers.
Batch Processing of 100mm, 150mm wafers
UV curing yields stronger etch resistance, cleaner ashing and higher implant temperatures.
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This material is based upon work supported by the National Science Foundation under Grant No. ECS-0335765. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.
Cornell NanoScale Science & Technology Facility (CNF)
250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700
Voice: 607-255-2329, Fax: 607-255-8601, Email: firstname.lastname@example.org
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