E-beam Pattern Conversion and Proximity Correction

Description:

The preparation of large layout data for e-beam direct write requires a highly efficient, flexible and robust framework for design and execution of complex processes including layout handling, processing, PEC, process modeling & correction, inspection and conversion to the machine format. Layout BEAMER is a highly intuitive, process flow driven layout processing solution.

Capabilities:

- VisualFLOWTM graphical user interface for drag & drop design of process flows
- Import of layouts in different formats
- Layout Viewer
- Extraction of cells, layers or regions of interest
- Export to different formats
- Layout operation (e.g. healing, tone-reversal, bias, Boolean functions)
- E-Beam Proximity Effect Correction
- Output formatter for different E-Beam machines

http://www.genisys-gmbh.de/

Additional Resources: